HR STEM-HAADF Hafnium silicate Rare earth Pulvérisation cathodique Hafnium silicates Structural properties Citric acid Quantum-well Rare earths Luminescence Optical amplifiers Couches minces semi-conductrices Nanostructure Epitaxy Oxide interface Friction Grazing incidence X-ray diffraction Terres rares Conductivity Laser pyrolysis MoS2 Si-rich silicon oxide Waveguides RF magnetron sputtering Multilayers Nanostructuring Irradiation Al2O3 Sputtering Microstructure Lifetime XRD Raman scattering Oxides AFM GENOMIQUE Rare-earth ions Microstructure physique Copper Couches minces Electron paramagnetic resonance Electroluminescence IR spectroscopy Atom probe tomography CO adsorption Optical properties Si nanocluster Waveguide Silicon photonics Guide d'onde Phase transition Down-conversion Crystal structure Nanoparticles Reactive magnetron sputtering Silicon nanocrystals Hybrid materials Films Thin film Liposomes Nanoparticules Silicon Magnetron sputtering High-k dielectrics Refractive index M-lines Radiofrequency magnetron sputtering Infrared absorption Cathodoluminescence Oxide materials Terbium SiC CoMoS Thin films Energy transfer Computational electromagnetic methods Rare-earth FTIR Cerium Hillocks Microstructure physics Silicium Nanostructures Pulvérisation magnétron radiofréquence Erbium Feature erasure Silicon nanoclusters Raman Oxygen vacancies Neodymium Nanostructured materials Photovoltaic Semiconductors ADE-FDTD Photoluminescence Fluorescence Matériaux hybrides PZT Silicon nitride Doping